Method and apparatus for fabricating a microdiffraction grating

Purpose. Use in x-ray phase-contrast tomographs for early diagnosis of oncological, cardiovascular and neurological diseases.

Specifications.

  • Period of grating templates, µm 4-100
  • Template height, µm 1-40
  • Type of H+ beam ions
  • Beam energy, MeV 0.2-1.7
  • Template size, µm2 2000×500.

Application area. Medicine.

Advantages. A feature of the proposed method is the ability to irradiate a resistive sample along the entire line simultaneously, in contrast to lithographic technologies, where axial optics and a beam in the form of a round spot are used, sequentially irradiating the line. This makes it possible to significantly reduce the irradiation time of the resistive sample and obtain grating templates in a few seconds.

Description. The physical principles of focusing a MeV proton beam into a line using a quadrupole probe-forming system of a nuclear scanning microprobe using proton-beam lithography are used.

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