Purpose. To control the surface roughness of large parts; on-line control; deviation of the shape of the controlled surface from flat is allowed.
Application area. Chemical industry, electronics, mechanical engineering, instrument making, microelectronics, nanotechnology, optics.
Advantages. Speed – one measurement per second (possibility of real-time monitoring); vibration resistance (the ability to install the system directly on the machine that produces the part); indestructibility; compactness.
Description. The principle of operation of the system is based on a change in the transverse coherence function of the field reflected from a rough surface in the polarization bias interferometer circuit. Since in such an interferometer the field is compared with itself, the deviation of the surface shape from flat has practically no effect on the measurement accuracy. This allows you to control surfaces with radii of curvature up to 200 mm. The resolution for the standard deviation of the profile from the baseline Rq is 0.001 µm. The limits of measured heights according to Rq are 0.002 – 0.15 µm.