Technology for producing an uncooled sensitive element for an IR photodetector based on silicon single crystals

Purpose. The technology is designed to simplify manufacturing, expand the photosensitivity and application range, and radiation resistance of the receiver by changing process operations.

Description. The technology for producing a sensitive element for an IR radiation photodetector is aimed at expanding the range of photosensitivity and application, as well as the radiation resistance of such a photodetector. The material from which the sensitive element was made was an n-type silicon single crystal grown by the Czochralski method and doped with a phosphorus impurity with a concentration of 2.2 x 1016 cm-3. This sensitive element was manufactured in the shape of a rectangular parallelepiped and irradiated with electron beams with an energy of 12 MeV ranging from 5•1016 to 3•1017 el/cm2. In this case, the silicon single crystal obtained using the proposed technology and, accordingly, the sensitive element will be simultaneously photosensitive at wavelengths λ=1.1 μm, λ=11.6 μm and λ=12 μm of infrared radiation.

Specifications. The sensitive element of the IR radiation photodetector is made on the basis of silicon single crystals irradiated with electrons with an energy of 12 MeV and a flux of up to 3•1017 electrons/cm2, doped in the process of growing using the Czochralski method with phosphorus impurities, a concentration of 2.2•3 rectangular parallelepipeds, is photosensitive to wavelengths λ=1.1 µm, λ=11.6 µm and λ=12 µm of infrared radiation.

Advantages. Relatively low cost, high radiation resistance, ability to detect both short- and long-wavelength infrared radiation.

Application area. Instrumentation, telecommunications, construction, photoelectronics, medicine.

Novelty. 1 patent of Ukraine.

Technology readiness stage. At the testing stage.

Proposals for cooperation. Sale of patents.

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